JPH023074U - - Google Patents
Info
- Publication number
- JPH023074U JPH023074U JP7999888U JP7999888U JPH023074U JP H023074 U JPH023074 U JP H023074U JP 7999888 U JP7999888 U JP 7999888U JP 7999888 U JP7999888 U JP 7999888U JP H023074 U JPH023074 U JP H023074U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- refrigerator
- liquid nitrogen
- stage
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7999888U JPH023074U (en]) | 1988-06-16 | 1988-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7999888U JPH023074U (en]) | 1988-06-16 | 1988-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH023074U true JPH023074U (en]) | 1990-01-10 |
Family
ID=31304845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7999888U Pending JPH023074U (en]) | 1988-06-16 | 1988-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH023074U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4911138U (en]) * | 1972-05-09 | 1974-01-30 | ||
| JPS59195227U (ja) * | 1983-06-13 | 1984-12-25 | 篠塚 賢二 | 軸接手 |
-
1988
- 1988-06-16 JP JP7999888U patent/JPH023074U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4911138U (en]) * | 1972-05-09 | 1974-01-30 | ||
| JPS59195227U (ja) * | 1983-06-13 | 1984-12-25 | 篠塚 賢二 | 軸接手 |